Mai Tasirin Ƙarshen Ceramic Mai Rufi na Teflon - Wurin da ba ya mannewa don Kula da Wafer Mai Sauƙi
Mai amfani da ƙarshen yumbu mai rufi na St.Cera's Teflon (PTFE) ya haɗu da wani abu mai ƙarfi na alumina tare da shafi mai laushi mai laushi (ƙarancin PTFE) (kauri 15-30 μm). Rufin yana ba da ƙarancin mannewa (≤0.1), juriya ga sinadarai masu kyau, da kuma halayen da ba sa mannewa, yana hana mannewa da kuma kawar da gurɓataccen bayan gida. Rufin yumbu mai tushe (99.8% Al₂O₃) yana ba da ƙarfin lanƙwasa mai yawa (361–1000 MPa), juriya ga lalacewa, da kwanciyar hankali na zafi har zuwa 260°C (iyaka ga shafi). Wannan mai amfani da ƙarshe ya dace don sarrafa wafers masu laushi, siriri, ko masu mannewa (misali, bayan rufewar photoresist ko hanyoyin sinadarai).
Bayani dalla-dalla (bisa ga 99.8% Al₂O₃ substrate tare da rufin PTFE):
| Kadara | darajar |
| Kayan Substrate | 99.8% Alumina (Ivory) |
| Kayan Shafi | Teflon (PTFE) |
| Kauri na Rufi | 15–30 μm |
| Coefficient of Friction (An rufe) | ≤0.1 |
| Ƙarfin Lankwasawa na Substrate (Al₂O₃) | 361 MPa |
| Taurin ƙasa (Al₂O₃) | 16 GPA |
| Yawan substrate | 3.93 g/cm³ |
| Matsakaicin Zafin Aiki (iyakan shafi) | 260°C |
| Taurin saman (kafin a shafa) | Ra ≤0.4 μm |
| Ƙarfin Dielectric (substrate) | 15×10⁶ V/m |
Lura: Rufin PTFE yana iyakance matsakaicin zafin jiki zuwa 260°C; don aikace-aikacen zafi mafi girma, yi la'akari da yumbu ko wasu rufi marasa rufi.
Aikace-aikace:
- · Kula da wafers bayan shafa mai hana daukar hoto (sassan da ke mannewa)
- · Canja wurin wafers masu siriri ko marasa ƙarfi (yana hana mannewa)
- · Kayan aikin duba semiconductor da kuma tsarin aunawa
- · Tsarin sarrafa kansa na ɗakin tsaftacewa inda dole ne a rage gurɓatar ƙwayoyin cuta
Tsarin Masana'antu:
An yi wa ƙasa mai laushi da kuma daidaitacce ta yumbu → ƙaiƙayin saman (ƙwanƙwasa plasma ko fashewar grit) → Feshin PTFE → Ƙarfin zafi a 380°C → Dubawa ta ƙarshe. Ana duba kowane mai aiki na ƙarshe don kauri na shafi (eddy current), mannewa (gwajin giciye-yanke ASTM D3359), da kuma yawan gogayya.
Sarrafa Inganci:
Dubawar gani 100% don ramukan fil ko kumfa; daidaiton kauri na rufi a cikin ±5 μm; babu ɓarna bayan gwajin lanƙwasa 90° akan takardar shaidar. Duba girma zuwa haƙurin OEM (tsawon ±0.05 mm, siffa ≤0.1 mm).
Fa'idodi akan Rufin da ba a rufe ba ko wasu Rufin:
- · Wurin da ba ya mannewa yana hana mannewa da karyewar wafer
- · Mafi ƙarancin ma'aunin gogayya tsakanin rufin yumbu
- · Kyakkyawan juriya ga sinadarai (acids, tushe, da sauran sinadarai)
- · Rage samar da barbashi ta hanyar hana canja wurin abu
Iyakoki (bayani kan karkacewar abu):
Ba a samo rufin PTFE daga teburin kayan da aka bayar ba (Al₂O₃, ZrO₂, Si₃N₄, BeO). Sifofin substrate suna bin takardar bayanai da aka bayar (99.8% Al₂O₃). Sifofin rufi sun dogara ne akan ƙayyadaddun PTFE na masana'antu, saboda ba a bayar da bayanan rufi ba. Don aikace-aikacen da suka wuce 260°C, ana ba da shawarar amfani da mai amfani da ƙarshen yumbu wanda ba a rufe ba.*
Keɓancewa:
Akwai shi a tsayin 150-1500 mm, siffofi na gefen (riƙewa, Bernoulli, lebur), tsarin flange da aka ɗora bisa ga zanen OEM. Rufin ɓangare (wuraren hulɗa kawai) ko cikakken murfin zaɓi ne.
Nemi samfurin gwajin mannewa da gogayya.
