Zoben yumbu na Alumina Mai Tsabta Mai Kyau don Dakunan Tsarin CVD / PVD

Zoben yumbu na St.Cera an ƙera shi musamman don amfani a cikin ɗakunan sarrafa CVD (Sinadarin Turare) da PVD (Physical Vapor Deposition). An ƙera shi daga 99.8% na alumina mai tsarki (Al₂O₃), wannan zoben yana aiki azaman layin ɗakin, zoben mayar da hankali, ko kayan aikin sarrafawa don iyakance plasma da kare bangon ɗakin daga zaizayar ƙasa. Kayan yana ba da kyakkyawan juriya ga plasma, ƙarfin dielectric mai yawa (15×10⁶ V/m), da kwanciyar hankali na zafi har zuwa 1600°C, yana tabbatar da tsawon rai a cikin yanayin plasma mai ƙarfi na fluorine. Daidaitaccen haƙurin girma (±0.05 mm akan ID/OD) da lanƙwasa (≤10 μm) yana ba da damar daidaita matsayin gefen wafer, yana inganta daidaiton ajiya da rage samar da barbashi.

Bayani dalla-dalla (bisa ga 99.8% Al₂O₃):

Aikace-aikace:

• · Zoben mayar da hankali na ɗakin CVD da zoben gefe
• · Zoben garkuwar ɗakin PVD da zoben manne
• · Layin ɗakin da aka yi da kuma zoben murfin
• · Zoben ɗaurewar plasma a cikin tsarin etch na dielectric

Tsarin Masana'antu:

Matsi na Isostatic → injin kore → sintering a 1600°C → CNC ID/OD niƙa → lapping saman → tsaftacewar ultrasonic → 100% CMM dubawa. Ƙarshen saman mai santsi sosai (Ra ≤0.4 μm) yana rage mannewar barbashi.

Sarrafa Inganci:

• · Duba girma 100% (ID, OD, kauri, lanƙwasa)
• · Duba rini don ƙananan fasa a saman
• · Gwajin ƙarfin Dielectric bisa ga ASTM D149
• · Babu wani canji ko porosity da ake gani a ƙarƙashin na'urar hangen nesa ta 20×

Fa'idodi akan Zoben Karfe ko Quartz:

• · Tsawon rayuwa 5–10× fiye da zoben aluminum a cikin plasma na fluorine
• · Babu gurɓatar ƙarfe a cikin siririn fina-finai
• · Mafi girman juriyar plasma fiye da quartz (babu ramukan zaizayar ƙasa)
• · Yana kula da rufin lantarki >10¹⁴ Ω·cm koda bayan amfani na dogon lokaci

Madadin Kayan Aiki — Silicon Nitride (Si)₃N₄):

Ga aikace-aikacen da ke buƙatar ƙarin tauri na karyewa (6.2 MPa·m¹/²) da kuma ingantaccen juriya ga girgizar zafi (ƙimar faɗaɗawa 3.2×10⁻⁶/℃), akwai zoben Si₃N₄. Duk da haka, alumina ta fi araha ga yawancin aikace-aikacen CVD/PVD. Da fatan za a ƙayyade fifikon kayan lokacin yin oda.

Keɓancewa:

• · Rami-rami, bayanan martaba masu matakai, ko kuma bututun ƙarfe don hawa
• · Fuskar da aka shafa da Y₂O₃ don ingantaccen juriya ga plasma (zaɓi ne)
• · Zane-zanen Laser na lambar sashi / lambar fili

Lura:Bayanan da ke sama suna bin teburin mallakar Al₂O₃ da aka bayar ne kawai. Don zoben Si₃N₄, duba takardar bayanai ta Si₃N₄ da aka bayar daban.