Alumina Vacuum Chuck don Daidaita Dicing & Nika
An ƙera injin tsabtace alumina na St.Cera daga tsarkin Al₂O₃ mai inganci 99.8% tare da ramukan injin tsabtace injin daidai. Ikon niƙa namu daidai yana cimma daidaiton 0.003mm da kuma daidaiton 0.002mm, yana tabbatar da cewa babu wafer a lokacin yankewa, niƙa bayan gida, da kuma dubawa. Kayan yana ba da ƙarfin lanƙwasa mai yawa (361 MPa), tauri (16 GPa), da kwanciyar hankali na zafi har zuwa 800°C. Akwai shi a cikin tsari mai zagaye har zuwa diamita na waje 600mm (OD) da siffofi masu kusurwa huɗu har zuwa tsawon 1500mm. An ƙera ramukan injin tsabtace na musamman (tsarin mai tsakiya, radial, ko grid) don dacewa da takamaiman buƙatun aiki. Ana duba kowane bututun tare da na'urar laser interferometer kuma ana ba shi rahoton tabbatar da lanƙwasa.
Bayani dalla-dalla (bisa ga 99.8% Al₂O₃& Ƙarfin masana'antu na St.Cera):
| Kadara | darajar |
| Kayan Aiki | 99.8% Alumina (Ivory) |
| Yawan yawa | 3.93 g/cm³ |
| Ƙarfin Lankwasawa | 361 MPa |
| Taurin Vickers | 16 GPA |
| Diamita na waje (max) | 600mm |
| Kauri (max) | 100mm |
| Tsawon (matsakaicin) | 1500mm |
| Faɗi | 0.003mm |
| Daidaito tsakanin mutane | 0.002mm |
| Ƙarshen Fuskar | Ra0.1 |
| Matsakaicin Yanayin Aiki | 800°C |
Aikace-aikace:
- · Rage girman wafer da rubutu (200mm/300mm da mafi girma)
- · Niƙa bayan baya na siririn wafers
- · Duba ido da bincike
- · Babban sarrafa substrate
Daidaiton Masana'antu:
- · Daidaito: 0.005mm
- · Daidaito: 0.005mm
- · Zagaye: 0.002mm
- · Ma'aunin daidaito: 0.01mm
