Mai Inganta Ƙarshen Yumbu na Silicon Carbide (SiC) - Babban Tauri don Kula da Wafer Mai Zafi Mai Tsanani
An ƙera na'urar ƙarshen yumbu ta St.Cera daga silikon carbide mai tsafta (SiC abun ciki 99.72%, Si 0.05%) ta amfani da kayan S1111. Yana ba da kyawawan halaye na injiniya: ƙarfin lanƙwasa 449 MPa (wanda aka auna), modulus mai roba 457 GPa (wanda aka auna), da taurin Vickers 25-28 GPa (wanda aka saba). Ƙananan yawa (3.10-3.15 g/cm³, wanda aka saba) yana ba da babban tauri, wanda ya dace da robots masu canja wurin wafer mai sauri. Tare da ƙarfin zafi na 120-150 W/m·K (wanda aka saba) da kuma ƙimar faɗaɗa zafi na 4.0-4.5×10⁻⁶/℃ (wanda aka saba), wannan na'urar ƙarshen tana wargaza zafi yadda ya kamata kuma tana kiyaye daidaiton girma yayin sarrafa zafin jiki mai yawa (har zuwa 1600–1700°C, babu kaya). Launin baƙi/toka da kuma rashin shan ruwa yana tabbatar da dacewa da tsabtataccen ɗaki.
Bayani dalla-dalla(bisa ga rahoton gwaji na SiC S1111 da aka bayar da kuma ƙimar da aka saba da ita):
| Kadara | darajar |
| Kayan Aiki | SiC (99.72% SiC, 0.05% Si Kyauta) |
| Launi | Baƙi/Toka |
| Yawan yawa | 3.10–3.15 g/cm³ |
| Shan Ruwa | 0% |
| Ƙarfin Lankwasawa | 449 MPa (matsakaici) |
| Taurin Karyewa | 3.12 MPa·m¹/² (matsakaici) |
| Modulus mai laushi | 457 GPA |
| Taurin Vickers | 25–28 GPA |
| Tsarin isar da zafi (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Matsakaicin Yanayin Amfani (babu kaya) | 1600–1700°C |
Aikace-aikace:
● Kula da wafer mai zafi sosai (bayan anneal, RTP, epitaxy)
● Dakunan etch na plasma da ke buƙatar juriya ga zaizayar ƙasa
● Robot masu saurin canja wuri (mai sauƙi, mai tauri sosai)
Masana'antu:
SiC foda sintering → Daidaiton niƙa bayanin hannu da abubuwan hawa CNC → lapping saman → tsaftacewar ultrasonic. Duba girma 100% da gwajin zubar helium don aikace-aikacen injin.
Sarrafa Inganci:
● Duba CMM na tsayi, faɗi, da kuma siffa
● Gwajin ƙarfin lankwasawa a kowane rukuni (a kowace rahoton gwaji)
● Duba ido a ƙarƙashin na'urar hangen nesa don gano lahani a saman fuska
Fa'idodi akan Alumina ko Karfe:
● Modulus mai ƙarfi 2× (457 vs ~380 GPa don alumina) – ƙarancin karkacewa
● 3× mafi girman ƙarfin lantarki na zafi - saurin watsar da zafi
● Yana jure wa >1600°C idan aka kwatanta da 800°C na alumina a cikin iska
● Ƙarancin yawa fiye da ƙarfe - rage nauyi kashi 40%
Keɓancewa:
Tsawonsa 150–450 mm, siffofi na gefen (riƙe gefen, Bernoulli, lebur), tsarin flange da aka ɗora bisa ga zanen OEM.
*Duk bayanan injina da ke sama sun fito ne daga rahoton gwajin da aka bayar (babban S1111). Ƙimar zafi da tauri sun zama ruwan dare ga wannan matakin SiC; da fatan za a tuntuɓe mu don samun takaddun shaida na musamman.*
