Akwatin injin tsabtace alumina mai inci 12 don sarrafa wafer 300mm

An ƙera injin tsabtace injin na St.Cera mai inci 12 daidai gwargwado daga alumina mai tsafta mai kashi 99.8% (Al₂O₃) don sarrafa wafer mai girman 300mm. Buck ɗin yana da saman da aka yi wa tsagi mai kyau (faɗin tsagi 0.5–1.0 mm, tsayi 2–3 mm) don tabbatar da rarraba injin tsabtace mai daidai gwargwado a duk faɗin diamita na 300mm. Ana kiyaye shi a cikin 5 μm, wanda ke ba da damar daidaita wafer mara warp yayin yankewa, niƙa a bayan gida, da dubawa. Babban ƙarfin lanƙwasa na kayan (361 MPa) da tauri (16 GPa) suna ba da garantin kwanciyar hankali na dogon lokaci koda a lokacin zagayowar injin tsabtace mai maimaitawa.

Bayani dalla-dalla (bisa ga 99.8% Al₂O₃):

Aikace-aikace:

 300mm yanke da rubutu na wafer
Nika bayan wafer (ƙaramin tallafin wafer)
 Duba ido da bincike
Mai ɗaurewa/cire haɗin wucin gadi

Masana'antu:

An yi amfani da injin CNC a ƙasa kuma an lanƙwasa shi har zuwa matakin ƙarshe, an yi masa ratsi da tayoyin lu'u-lu'u, an tsaftace shi da ultrasonic, sannan aka sanya shi a cikin ɗakin tsabta na Class 100. Ana duba kowane bututu 100% don ganin ko yana da lanƙwasa (laser interferometer) da zurfin rami (profilometer).

Fa'idodi:

Ƙarancin samar da ƙwayoyin cuta (≤0.05 ƙwayoyin cuta/cm²)

Mai narkewar sinadarai da sinadarai masu guba

Sufin da ke da aminci ga ESD (juriya > 10¹³ Ω·cm)

Tsarin ramin injin na musamman da tashoshin bayan gida suna samuwa.