-
Hannun Robot na Alumina mai Tsarkakakken Alumina don Gudanar da Wafer
An ƙera hannun robot ɗin alumina na St.Cera daidai gwargwado daga Al₂O₃ mai ƙarfi 99.8% (alumina). Yana haɗa ƙarfin lanƙwasa na musamman (361 MPa), tauri mai yawa (16 GPa), da ƙarancin yawa (3.93 g/cm³), wanda ke haifar da hannu mai sauƙi amma mai tauri don canja wurin wafer na semiconductor. Ma'aunin faɗaɗa zafi na kayan (7.2×10⁻⁶/°C) yana daidaita silicon sosai, yana rage rashin daidaiton zafi yayin sarrafawa.
-
Bernoulli Ceramic Effect Effect — Kula da Wafer mara taɓawa don Wafers masu siriri da rauni
Na'urar St.Cera's Bernoulli ceramic end effector tana amfani da iskar gas don sarrafa wafers ba tare da taɓawa ta jiki ba. An ƙera ta daga alumina mai tsarki 99.8% (Al₂O₃) ko silicon carbide (SiC), tana da bututun ƙarfe masu inganci waɗanda ke fitar da iskar gas mai matsi don ƙirƙirar fim ɗin iska mai siriri tsakanin na'urar ƙarewa da wafer. Wannan ƙa'idar da ba ta taɓawa ba tana kawar da gurɓataccen gefen baya, guntuwar gefen, da lalacewar saman, wanda hakan ya sa ya dace da wafers masu siriri (≤100 μm), masu rauni, ko masu lanƙwasa. Na'urar yumbu tana ba da ƙarfin lanƙwasa mai yawa (361 MPa don Al₂O₃; har zuwa 550–600 MPa don SiC), ƙarancin nauyi, da kwanciyar hankali mai kyau, yana tabbatar da matsayi mai maimaitawa a cikin robots masu canja wurin wafer mai sauri.
-
Mai Tasirin Ƙarshen Ceramic Mai Rufi na Teflon - Wurin da ba ya mannewa don Kula da Wafer Mai Sauƙi
Mai amfani da ƙarshen yumbu mai rufi na St.Cera's Teflon (PTFE) ya haɗu da wani abu mai ƙarfi na alumina tare da shafi mai laushi mai laushi (ƙarancin PTFE) (kauri 15-30 μm). Rufin yana ba da ƙarancin mannewa (≤0.1), juriya ga sinadarai masu kyau, da kuma halayen da ba sa mannewa, yana hana mannewa da kuma kawar da gurɓataccen bayan gida. Rufin yumbu mai tushe (99.8% Al₂O₃) yana ba da ƙarfin lanƙwasa mai yawa (361–1000 MPa), juriya ga lalacewa, da kwanciyar hankali na zafi har zuwa 260°C (iyaka ga shafi). Wannan mai amfani da ƙarshe ya dace don sarrafa wafers masu laushi, siriri, ko masu mannewa (misali, bayan rufewar photoresist ko hanyoyin sinadarai).
