Zoben Hatimin Alumina Mai Tsabta Mai Tsabta don Hatimin Ɗakin Zafi Mai Zafi

An tsara zoben hatimin St.Cera a matsayin madadin zoben O-polymer a cikin mawuyacin yanayi inda elastomers ke lalacewa. An ƙera shi daga alumina mai tsafta mai ƙarfi 99.8% (Al₂O₃), ana amfani da wannan zoben hatimi mai tauri a aikace-aikacen hatimin tsaye - yawanci an haɗa shi da gasket mai laushi na ƙarfe ko graphite - don samar da ingantaccen ɗaukar iskar gas ko iskar gas a yanayin zafi har zuwa 800°C da kuma a cikin yanayin plasma ko sinadarai masu ƙarfi. Kayan yana ba da iskar gas mara fitarwa, ƙarfin matsi mai yawa (ƙarfin lanƙwasa na ƙarƙashin ƙasa 361 MPa), da rashin kuzarin sinadarai (mai jure wa halogens, acid, da alkalis banda HF). Fuskokin hatimin da aka daidaita (faɗi ≤5 μm, ƙaiƙayin saman Ra ≤0.2 μm) suna tabbatar da cewa suna haɗuwa da ƙarfe ko kayan yumbu.

Bayani dalla-dalla(bisa ga 99.8% Al₂O₃):

Aikace-aikace:

• · Hatimin da ke tsaye a ɗakin sarrafa semiconductor (CVD, PVD, etch)
• · Hatimin ƙofar murhu mai zafi sosai
• · Flanges na ciyar da injin
• · Rufe tasoshin sinadarai masu guba

Tsarin Masana'antu:

Matsi na Isostatic → sintering a 1600°C → daidaiton lapping na gefe biyu don cimma fuskokin rufewa masu faɗi da santsi → chamfering na gefen → tsaftacewar ultrasonic. Kowane zobe an gwada shi 100% ta hanyar na'urar gano zubar da helium tare da gasket na ƙarfe na yau da kullun.

Sarrafa Inganci:

• · Duba girman CMM (ID, OD, kauri, daidaitawa)
• · Ma'aunin saman don Ra da kuma waviness
• · Auna faɗin fuska ta amfani da ɗakin gani
• · Gwajin zubar da Helium (hanyar matsi bayan baya)

Fa'idodi akan zoben polymer O-ring:

• Yana jurewa 800°C vs. <300°C don FFKM
• · Babu fitar da hayaki mai gurbata muhalli — babu gurɓatar muhallin injin
• · Yana jure wa dukkan sinadarai na plasma (fluorine, chlorine, oxygen)
• · Babu saitin matsi ko nakasa ta dindindin
• · Rayuwar sabis mara iyaka a cikin tsaftataccen muhalli

Iyakoki (Bayani Masu Muhimmanci):

• · Ba O-ring ba— zobe ne mai tauri da ke buƙatar gasket mai laushi (tagulla, aluminum, ko graphite) don rufewa.
• · Ba ya ɗaukar motsin motsi ko babban kuskuren flange.
• · Farashi mafi girma fiye da zoben polymer O, amma tsawon rai yana rage farashin mallakar.
• · Mai rauni — riƙe da kyau; guje wa matsin lamba ko lanƙwasawa.

Lura:Bayanan da ke sama sun bi tsarin teburin mallakar Al₂O₃ da aka bayar. Ba a bayar da bayanai game da kayan elastomeric ba. Wannan samfurin zoben hatimi ne mai tsayayye, ba zoben O-ring na elastomeric ba. Da fatan za a tabbatar ko wannan ya cika buƙatun aikace-aikacenku.