Zoben Mai Tsabta na Alumina Chamber Mai Tsabta don Tsarin Plasma Etch & CVD

Zoben mayar da hankali na ɗakin St.Cera wani muhimmin kayan aiki ne da ake amfani da shi a cikin kayan aikin plasma etch, CVD, da PVD semiconductor. An ƙera shi daga 99.8% alumina mai tsabta (Al₂O₃), zoben yana kewaye gefen wafer don iyakance plasma da inganta rarrabawar kusurwar ion, ta haka yana inganta daidaiton etch a saman wafer. Kayan yana ba da juriya na plasma na musamman, ƙarfin dielectric mai girma (15×10⁶ V/m), da kwanciyar hankali na zafi har zuwa 1600°C, yana tabbatar da aminci na dogon lokaci a cikin yanayin plasma mai ƙarfi na fluorine ko chlorine. ID/OD mai daidaito da lanƙwasa (≤10 μm) yana ba da damar daidaita gefen wafer, rage lahani na gefen da samar da barbashi.

Bayani dalla-dalla(bisa ga 99.8% Al₂O₃):

Aikace-aikace:

• Zoben mayar da hankali kan ɗakin etch na Dielectric (oxide, nitride etch)
• · Zoben gefen ɗakin etch na silicon
• · Kayan aikin tsarin ɗakin CVD
• · Zoben garkuwar ɗakin PVD da mannewa

Tsarin Masana'antu:

Ana matse foda mai tsafta mai ƙarfi ta hanyar keɓancewa → kore a injin da aka ƙera zuwa siffar da ta kusa da raga → an niƙa shi a 1600°C → Niƙa lu'u-lu'u na CNC na ID, OD, da kauri → lapping don cimma lanƙwasa ≤10 μm → Tsaftace ultrasonic → Duba 100% CMM. Kammala saman Ra ≤0.4 μm yana rage mannewar barbashi.

Sarrafa Inganci:

• · Duba girma 100% (ID, OD, kauri, daidaitawa)
• · Gwajin shigar rini don ƙananan fasa (ba a yarda da fasa ba)
• · Duba gani a ƙarƙashin na'urar hangen nesa ta 20× — babu guntu, ko ɓoyewa, ko canza launi
• · Gwajin ƙarfin Dielectric bisa ga ASTM D149 (samfurin)

Fa'idodi akan Zoben Silicon ko Quartz:

• · Tsawon rayuwa na tsawon lokaci 5–10 a cikin plasma na fluorocarbon
• · Babu barbashi masu lalacewa da za su gurɓata wafers
• · Ƙarfin dielectric mafi girma yana hana yin lanƙwasa
• · Yana kiyaye lanƙwasa da daidaiton girma a cikin dubban sa'o'in RF

Madadin Kayan Aiki — Zirconia Mai Daidaita Yttria (ZrO2)₂):

Ga aikace-aikacen da ke buƙatar ƙarin tauri na karyewa (misali, ɗakunan da ke yawan zagayowar zafi ko girgizar injina), zoben mayar da hankali na ZrO₂ (yawan 6.03 g/cm³, ƙarfin lanƙwasa 1000 MPa, tauri na karyewa 5–8 MPa·m¹/²) suna samuwa. Duk da haka, alumina tana ba da ingantaccen amfani da farashi kuma ita ce ma'aunin masana'antu ga yawancin aikace-aikacen zoben mayar da hankali.

Keɓancewa:

• · Matakai na bayanin martaba, ramukan counterbore, ko ramukan hawa ga kowane zane na abokin ciniki
• · Rufin Y₂O₃ don ingantaccen juriya ga zaizayar jini (kauri 20–100 μm)
• · Alamar Laser ta lambar sashi, lambar kwanan wata, ko alamun daidaitawa

Lura:Duk bayanan suna bin jadawalin kadarorin Al₂O₃ da aka bayar ne kawai. Don takamaiman bayanai na ZrO₂, duba takardar bayanai ta zirconia da aka bayar. Tsarin zoben mai da hankali na iya buƙatar izinin haƙƙin mallaka - abokan ciniki suna da alhakin tabbatar da haƙƙin kadarorin fasaha.