Farantin Rarraba Iskar Gas na Alumina don Kan Shawa na CVD/PVD
An yi amfani da farantin rarraba iskar gas na St.Cera (kan shawa) daidai gwargwado daga yumbu mai ƙarfi 99.8% na alumina. Yana da jerin ƙananan ramuka (diamita 0.3–1.5 mm) waɗanda ke tabbatar da kwararar iskar gas iri ɗaya a saman wafer yayin aiwatar da CVD, PVD, ko ALD. Ƙarfin dielectric na farantin (>15×10⁶ V/m) da juriyar plasma sun sa ya zama dole don adana siraran fim na semiconductor.
Bayani dalla-dalla:
| Kadara | darajar |
| Kayan Aiki | 99.8% Al₂O₃ ko SiC |
| diamita | 100 - 1500mm (zagaye) ko murabba'i mai kusurwa huɗu |
| Kauri | 5 – 20 mm |
| Diamita na rami | 0.3 – 1.5 mm |
| Tsarin Rami | Na musamman (mai kusurwa uku, murabba'i, radial) |
| Faɗi | ≤10 μm a kan cikakken yanki |
| Taushin saman | Ra ≤0.6 μm (gefen gas) |
| Rabon Buɗaɗɗen Yanki | 5–15% |
Aikace-aikace:
Farantin kai na PECVD
Masu shigar da iskar gas na ALD
Farantin rarraba iskar gas na Etch chamber
Abubuwan haɗin reactor na MOCVD
Masana'antu:
An yi amfani da kayan aikin haƙa ramin alumina mai faɗi → haƙa CNC da kayan aikin da aka lu'u-lu'u (juriyar matsayin rami ±0.02 mm) → cirewa → tsaftacewar ultrasonic → marufi na aji 100.
Sarrafa Inganci:
Ana duba kowace faranti 100% don ganin girman ramin (tsarin gani), faɗin (laser interferometer), da kuma daidaiton kwararar iskar gas (taswirar matsi). Babu ƙananan fasa a ƙarƙashin na'urar hangen nesa ta x 20.
Fa'idodi akan Faranti na Karfe:
Babu gurɓataccen ƙarfe a cikin fina-finai na siriri
Ƙananan ƙwayoyin cuta (babu tsatsa)
Yana jure wa ƙwayoyin cuta masu ƙarfi (CF₄, NF₃)
Siffofin Musamman:
Tashoshin iskar gas na baya, ramukan da ba su da kyau, hatimin gefen, da kuma nau'ikan kayan aiki daban-daban (SiC don ƙarin ƙarfin zafi, shafi na Y₂O₃ don juriya ga plasma).
Muna ba da tabbacin CAD da kwaikwayon kwarara kafin ƙera.
