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Zoben yumbu mai inganci na Alumina mai inganci sassa na yumbu
An ƙirƙira shi ta hanyar matsi mai sanyi da kuma niƙa a ƙarƙashin zafin jiki mai yawa, sannan a gyara shi da kuma goge shi, kayan aikin yumbu na iya biyan duk wani ƙa'ida mai tsauri na kayan aikin semiconductor tare da fasalulluka na juriya ga lalacewa, juriya ga tsatsa, ƙarancin faɗaɗa zafi, da kuma rufin rufi. Yumbu na iya aiki a cikin nau'ikan kayan aikin samar da semiconductor iri-iri tare da yanayin zafi mai yawa, iskar gas ko iskar gas mai lalata na dogon lokaci.
An yi shi da foda mai tsabta na alumina, wanda aka sarrafa ta hanyar matsi mai sanyi, sintering mai zafi da kammalawa daidai, zai iya kaiwa ga juriyar girma zuwa ±0.001 mm, kammala saman Ra 0.1, juriyar zafin jiki 1600℃.
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Kayan aikin Semiconductor na musamman na ST.CERA na yumbu
An ƙirƙira shi ta hanyar matsi mai sanyi da kuma niƙa a ƙarƙashin zafin jiki mai yawa, sannan a gyara shi da kuma goge shi, kayan aikin yumbu na iya biyan duk wani ƙa'ida mai tsauri na kayan aikin semiconductor tare da fasalulluka na juriya ga lalacewa, juriya ga tsatsa, ƙarancin faɗaɗa zafi, da kuma rufin rufi. Yumbu na iya aiki a cikin nau'ikan kayan aikin samar da semiconductor iri-iri tare da yanayin zafi mai yawa, iskar gas ko iskar gas mai lalata na dogon lokaci.
An yi shi da foda mai tsabta na alumina, wanda aka sarrafa ta hanyar matsi mai sanyi, sintering mai zafi da kammalawa daidai, zai iya kaiwa ga juriyar girma zuwa ±0.001 mm, kammala saman Ra 0.1, juriyar zafin jiki 1600℃.
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Mai Inganta Ƙarshen Yumbu na Silicon Carbide (SiC) - Babban Tauri don Kula da Wafer Mai Zafi Mai Tsanani
An ƙera na'urar ƙarshen yumbu ta St.Cera daga silikon carbide mai tsafta (SiC abun ciki 99.72%, Si 0.05%) ta amfani da kayan S1111. Yana ba da kyawawan halaye na injiniya: ƙarfin lanƙwasa 449 MPa (wanda aka auna), modulus mai roba 457 GPa (wanda aka auna), da taurin Vickers 25-28 GPa (wanda aka saba). Ƙananan yawa (3.10-3.15 g/cm³, wanda aka saba) yana ba da babban tauri, wanda ya dace da robots masu canja wurin wafer mai sauri. Tare da ƙarfin zafi na 120-150 W/m·K (wanda aka saba) da kuma ƙimar faɗaɗa zafi na 4.0-4.5×10⁻⁶/℃ (wanda aka saba), wannan na'urar ƙarshen tana wargaza zafi yadda ya kamata kuma tana kiyaye daidaiton girma yayin sarrafa zafin jiki mai yawa (har zuwa 1600–1700°C, babu kaya). Launin baƙi/toka da kuma rashin shan ruwa yana tabbatar da dacewa da tsabtataccen ɗaki.
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Injin tsabtace ruwa mai tushen silicon carbide (SiC) don yanayin zafi mai yawa da yanayin jini
An ƙera maƙallin yumbu na St.Cera daga silikon carbide mai tsafta (batch S1111, SiC 99.72%, kyauta Si 0.05%). Yana bayar da ƙarfin lanƙwasa da aka auna na 449 MPa, taurin karyewa na 3.12 MPa·m¹/², da kuma tsarin roba na 457 GPa. Tsarin watsa zafi na kayan (120–150 W/m·K) da ƙarancin faɗaɗa zafi (4.0–4.5×10⁻⁶/℃) yana ba da damar saurin hawan zafin jiki da ƙarancin warpage na wafer yayin zagayowar zafi. Ana iya tsara maƙallin a matsayin maƙallin injin tsotsa mai ramuka (guda ɗaya na iskar gas) ko maƙallin tsagi mai tsatsa. Tare da matsakaicin zafin amfani na 1600–1700°C (babu kaya) da juriya ga zaizayar jini na plasma, wannan maƙallin ya dace da sarrafa wafer mai zafi (annealing, RTP) da ɗakunan etch masu ƙarfi inda maƙallan alumina ke lalacewa.
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Kayan Aikin Semiconductor Kayan Aikin Yumbu Kayan Aikin Yumbu
An ƙirƙira shi ta hanyar matsi mai sanyi da kuma niƙa a ƙarƙashin zafin jiki mai yawa, sannan a gyara shi da kuma goge shi, kayan aikin yumbu na iya biyan duk wani ƙa'ida mai tsauri na kayan aikin semiconductor tare da fasalulluka na juriya ga lalacewa, juriya ga tsatsa, ƙarancin faɗaɗa zafi, da kuma rufin rufi. Yumbu na iya aiki a cikin nau'ikan kayan aikin samar da semiconductor iri-iri tare da yanayin zafi mai yawa, iskar gas ko iskar gas mai lalata na dogon lokaci.
An yi shi da foda mai tsabta na alumina, wanda aka sarrafa ta hanyar matsi mai sanyi, sintering mai zafi da kammalawa daidai, zai iya kaiwa ga juriyar girma zuwa ±0.001 mm, kammala saman Ra 0.1, juriyar zafin jiki 1600℃.
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Zoben niƙa na Alumina mai ƙarfe don aikace-aikacen lapping mai ƙarfi
Zoben niƙa na alumina na St.Cera da aka yi da ƙarfe ya haɗa da wani Layer na yumbu mai tsafta (99.8% Al₂O₃) tare da madaurin ƙarfe mai daidaito (yawanci aluminum ko bakin ƙarfe). Wannan ƙirar haɗin gwiwa tana ba da juriyar lalacewa ta musamman da rashin ƙarfin sinadarai na yumbu a saman niƙa, yayin da tushen ƙarfe ke ƙara ƙarfin injiniya, sauƙin hawa, da juriya ga karyewar karyewa. Layer na alumina yana ba da ƙarfin lanƙwasa na 361 MPa, taurin Vickers na 16 GPa, da kwanciyar hankali na zafi har zuwa 800°C. An keɓance tushen ƙarfe tare da ramukan hawa, fil ɗin gano wuri, ko halayen maganadisu don haɗawa cikin injunan lapping, injin niƙa na duniya, da kayan aikin CMP.
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Kayayyakin Kayayyakin Yumbu don Kayan Aikin Binciken Semiconductor
An ƙirƙira shi ta hanyar matsi mai sanyi da kuma niƙa a ƙarƙashin zafin jiki mai yawa, sannan a gyara shi da kuma goge shi, kayan aikin yumbu na iya biyan duk wani ƙa'ida mai tsauri na kayan aikin semiconductor tare da fasalulluka na juriya ga lalacewa, juriya ga tsatsa, ƙarancin faɗaɗa zafi, da kuma rufin rufi. Yumbu na iya aiki a cikin nau'ikan kayan aikin samar da semiconductor iri-iri tare da yanayin zafi mai yawa, iskar gas ko iskar gas mai lalata na dogon lokaci.
An yi shi da foda mai tsabta na alumina, wanda aka sarrafa ta hanyar matsi mai sanyi, sintering mai zafi da kammalawa daidai, zai iya kaiwa ga juriyar girma zuwa ±0.001 mm, kammala saman Ra 0.1, juriyar zafin jiki 1600℃.
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Musamman sarrafa Al2O3 yumbu Wafer Chuck
An ƙirƙira shi ta hanyar matsi mai sanyi da kuma niƙa a ƙarƙashin zafin jiki mai yawa, sannan a gyara shi da kuma goge shi, kayan aikin yumbu na iya biyan duk wani ƙa'ida mai tsauri na kayan aikin semiconductor tare da fasalulluka na juriya ga lalacewa, juriya ga tsatsa, ƙarancin faɗaɗa zafi, da kuma rufin rufi. Yumbu na iya aiki a cikin nau'ikan kayan aikin samar da semiconductor iri-iri tare da yanayin zafi mai yawa, iskar gas ko iskar gas mai lalata na dogon lokaci.
An yi shi da foda mai tsabta na alumina, wanda aka sarrafa ta hanyar matsi mai sanyi, sintering mai zafi da kammalawa daidai, zai iya kaiwa ga juriyar girma zuwa ±0.001 mm, kammala saman Ra 0.1, juriyar zafin jiki 1600℃.
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Kayan aikin Semiconductor na musamman na ST.CERA Farantin yumbu
An ƙirƙira shi ta hanyar matsi mai sanyi da kuma niƙa a ƙarƙashin zafin jiki mai yawa, sannan a gyara shi da kuma goge shi, kayan aikin yumbu na iya biyan duk wani ƙa'ida mai tsauri na kayan aikin semiconductor tare da fasalulluka na juriya ga lalacewa, juriya ga tsatsa, ƙarancin faɗaɗa zafi, da kuma rufin rufi. Yumbu na iya aiki a cikin nau'ikan kayan aikin samar da semiconductor iri-iri tare da yanayin zafi mai yawa, iskar gas ko iskar gas mai lalata na dogon lokaci.
An yi shi da foda mai tsabta na alumina, wanda aka sarrafa ta hanyar matsi mai sanyi, sintering mai zafi da kammalawa daidai, zai iya kaiwa ga juriyar girma zuwa ±0.001 mm, kammala saman Ra 0.1, juriyar zafin jiki 1600℃.
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Akwatin injin tsabtace alumina mai inci 12 don sarrafa wafer 300mm
An ƙera injin tsabtace injin na St.Cera mai inci 12 daidai gwargwado daga alumina mai tsafta mai kashi 99.8% (Al₂O₃) don sarrafa wafer mai girman 300mm. Buck ɗin yana da saman da aka yi wa tsagi mai kyau (faɗin tsagi 0.5–1.0 mm, tsayi 2–3 mm) don tabbatar da rarraba injin tsabtace mai daidai gwargwado a duk faɗin diamita na 300mm. Ana kiyaye shi a cikin 5 μm, wanda ke ba da damar daidaita wafer mara warp yayin yankewa, niƙa a bayan gida, da dubawa. Babban ƙarfin lanƙwasa na kayan (361 MPa) da tauri (16 GPa) suna ba da garantin kwanciyar hankali na dogon lokaci koda a lokacin zagayowar injin tsabtace mai maimaitawa.
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Mai Inganta Ƙarshen Alumina na Ceramic tare da Tashoshin Vacuum Masu Haɗaka
Injin cire kayan alumina na St.Cera yana haɗa hanyoyin cire kayan alumina masu inganci da ramukan tsotsa kai tsaye cikin jikin alumina mai tsafta 99.8%. Wannan ƙirar tana kawar da kushin injin na waje, wanda ke ba da damar ɗaukar wafer kai tsaye tare da ƙarfin riƙewa iri ɗaya. Babban ƙarfin lanƙwasa na kayan (361 MPa) da tauri (16 GPa) suna tabbatar da kwanciyar hankali na dogon lokaci a ƙarƙashin zagayowar injin. Ana kiyaye lanƙwasa a faɗin yankin injin a cikin 10 μm, yana hana damuwa da karyewar wafer. Tashoshin injin suna nan a flange na hawa na baya don sauƙin haɗawa da hannun robot na OEM.
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Sassan yumbu na ESD-Amintaccen Alumina don Kula da Wafer Mai Sauƙi
An ƙera sassan yumbu na St.Cera ESD (electrostatic discharge) masu aminci daga Al₂O₃ mai ƙarfi 99.8% tare da juriyar saman da aka keɓance na 10⁶–10⁹ Ω/sq, wanda aka samu ta hanyar amfani da doping ko shafi na musamman. Waɗannan sassan suna wargaza cajin da ba ya canzawa yadda ya kamata, suna hana lalacewar electrostatic ga wafers da na'urori masu laushi na semiconductor. Kayan tushe yana riƙe da ƙarfin lanƙwasa mai girma (361 MPa), tauri (16 GPa), da ƙarfin dielectric (15×10⁶ V/m). Sassan yumbu masu aminci na ESD sun haɗa da masu tasiri na ƙarshe, fil ɗin ɗagawa, dogayen jagora, da kayan haɗin musamman don sarrafa FAB.
